Copper-Based MOF Crystals for Low-k Dielectric Applications

被引:1
|
作者
Vineetha, V. S. [1 ,2 ]
Pradyumnan, P. P. [2 ]
机构
[1] Govt Arts & Sci Coll Kozhikode, Dept Phys, Kozhikode 673018, Kerala, India
[2] Univ Calicut, Dept Phys, Malappuram 673635, Kerala, India
关键词
dielectric materials; metal-organic frameworks; thermogravimetric analysis; SINGLE-CRYSTAL; OPTICAL-PROPERTIES; GROWTH; BEHAVIOR;
D O I
10.1002/crat.202200265
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Metal-organic frameworks (MOFs) are precious resources for future demands in every realm of life. Currently, researchers are striving to create MOF materials with low dielectric constants for the microelectronic sector. In this work, a MOF compound, copper dimandelate (CuDM), is crystallized using the regulated diffusion of cations through viscous reactant media and its suitability for dielectric applications is studied for the first time. The crystallinity of the compound is confirmed and structural characterization is carried out using powder X-ray diffraction measurements. The various functional groups present in the grown sample are confirmed by Fourier transform infrared and Raman analyses. Thermogravimetric analysis establishes the thermal stability of the material up to a temperature of 220 degrees C. The predicted chemical formula, (Cu[(C6H5) HOCH COO)](2)) is verified by CHNS elemental analysis. The observed dielectric constant varies from 18.55 to 8.15 with applied frequency ranging from 0.01 Hz to 10 MHz, making it suitable for low-k dielectric applications. The optical band gap and Urbach energy are obtained as 3.65 and 0.6211 eV, respectively, by UV-vis analysis. Solid-state dielectric parameters, which include valence electron plasma energy, Penn gap, Fermi energy, electrical polarizability, and susceptibility of the material, are calculated using theoretical formulations.
引用
收藏
页数:7
相关论文
共 50 条
  • [21] Synthesis and analysis of low-k material for intermetal dielectric applications in VLSI
    Joshi, Bhavana N.
    Mahajan, A. M.
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2008, 10 (02): : 422 - 426
  • [22] Negative magnetoresistance in a low-k dielectric
    McGowan, B. T.
    Lloyd, J. R.
    APPLIED PHYSICS LETTERS, 2014, 105 (25)
  • [23] Low-k dielectric reliability:: impact of test structure choice, copper and integrated dielectric quality
    Toekei, Zs.
    Li, Y. -L.
    Ciofi, I.
    Croes, K.
    Beyer, G. P.
    PROCEEDINGS OF THE IEEE 2008 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2008, : 111 - 113
  • [24] A novel polycarbosilane-based low-k dielectric material
    Wang, PI
    Wu, ZZ
    Lu, TM
    Interrante, LV
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2006, 153 (04) : G267 - G271
  • [25] A high performance 0.13 μm copper BEOL technology with low-k dielectric
    Goldblatt, RD
    Agarwala, B
    Anand, MB
    Barth, EP
    Biery, GA
    Chen, ZG
    Cohen, S
    Connolly, JB
    Cowley, A
    Dalton, T
    Das, SK
    Davis, CR
    Deutsch, A
    De Wan, C
    Edelstein, DC
    Emmi, PA
    Faltermeier, CG
    Fitzsimmons, JA
    Hedrick, J
    Heidenreich, JE
    Hu, CK
    Hummel, JP
    Jones, P
    Kaltalioglu, E
    Kastenmeier, BE
    Krishnan, M
    Landers, WF
    Liniger, E
    Liu, J
    Lustig, NE
    Malhotra, S
    Manger, DK
    McGahay, V
    Mih, R
    Nye, HA
    Purushothaman, S
    Rathore, HA
    Seo, SC
    Shaw, TM
    Simon, AH
    Spooner, TA
    Stetter, M
    Wachnik, RA
    Ryan, JG
    PROCEEDINGS OF THE IEEE 2000 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2000, : 261 - 263
  • [26] Novel photodefinable low-k dielectric polymers based on polybenzoxazines
    Romeo, Michael
    Yamanaka, Kazuhiro
    Maeda, Kazuhiko
    Henderson, Clifford L.
    ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXIV, 2007, 6519
  • [27] The impact of porosity on the formation of manganese based copper diffusion barrier layers on low-K dielectric materials
    McCoy, A. P.
    Bogan, J.
    Walsh, L.
    Byrne, C.
    O'Connor, R.
    Woicik, J. C.
    Hughes, G.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2015, 48 (32)
  • [28] Reliability of copper low-k interconnects
    Tokei, Zsolt
    Croes, Kristof
    Beyer, Gerald P.
    MICROELECTRONIC ENGINEERING, 2010, 87 (03) : 348 - 354
  • [29] Molecular modeling and synthesis of polymers for use in applications requiring a low-k dielectric
    Beall, GW
    Murugesan, S
    Galloway, HC
    Koeck, DC
    Jarl, J
    Abrego, F
    POLYMER, 2005, 46 (25) : 11889 - 11895
  • [30] Hydrogenation of Boron Carbon Nitride Thin Films for Low-k Dielectric Applications
    Nehate, Shraddha Dhanraj
    Sundaresh, Sreeram
    Peale, Robert
    Sundaram, Kalpathy B.
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2021, 10 (09)