Effects of indium composition on the surface morphological and optical properties of InGaN/GaN heterostructures

被引:1
|
作者
Hamzah, Nur Atiqah [1 ]
Md Sahar, Mohd Ann Amirul Zulffiqal [1 ]
Tan, Aik Kwan [1 ]
Ahmad, Mohd Anas [1 ]
Abdul Malik, Muhammad Fadhirul Izwan [2 ]
Loo, Chin Chyi [3 ]
Chang, Wei Sea [3 ]
Ng, Sha Shiong [1 ]
机构
[1] Univ Sains Malaysia, Inst Nano Optoelect Res & Technol INOR, George Town, Malaysia
[2] Univ Sains Malaysia, Sci & Engn Res Ctr SERC, George Town, Malaysia
[3] Monash Univ, Mech Engn Discipline, Sch Engn, Bandar Sunway, Selangor, Malaysia
关键词
III-V nitride; Semiconducting indium compounds; Epitaxy; Wide bandgap semiconductor; Energy efficiency; THIN-FILMS; SOLAR-CELLS; GROWTH; GAN; TEMPERATURE; DEFECTS;
D O I
10.1108/MI-03-2022-0042
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Purpose This study aims to investigate the effects of indium composition on surface morphology and optical properties of indium gallium nitride on gallium nitride (InGaN/GaN) heterostructures. Design/methodology/approach The InGaN/GaN heterostructures were grown on flat sapphire substrates using a metal-organic chemical vapour deposition reactor with a trimethylindium flow rate of 368 sccm. The indium composition of the InGaN epilayers was controlled by applying different substrate temperatures. The surface morphology and topography were observed using field emission scanning electron microscope (F.E.I. Nova NanoSEM 450) and atomic force microscopy (Bruker Dimension Edge) with a scanning area of 10 mu m x 10 mu m, respectively. The compositional analysis was done by Energy Dispersive X-Ray Analysis. Finally, the ultraviolet-visible (UV-Vis) spectrophotometer (Agilent Technology Cary Series UV-Vis-near-infrared spectrometer) was measured from 200 nm to 1500 nm to investigate the optical properties of the samples. Findings The InGaN/GaN thin films have been successfully grown at three different substrate temperatures. The indium composition reduced as the temperature increased. At 760 C, the highest indium composition was obtained, 21.17%. This result was acquired from the simulation fitting of omega-2 theta scan on (0002) plane using LEPTOS software by Bruker D8 Discover. The InGaN/GaN shows significantly different surface morphologies and topographies as the indium composition increases. The thickness of InGaN epilayers of the structure was similar to 300 nm estimated from the field emission scanning electron microscopy. The energy bandgap of the InGaN was 2.54 eV - 2.79 eV measured by UV-Vis measurements. Originality/value It can be seen from this work that changes in substrate temperature can affect the indium composition. From all the results obtained, this work can be helpful towards efficiency improvement in solar cell applications.
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收藏
页码:8 / 16
页数:9
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