Comparative study on the effect of substrates on electrical properties of tin and chromium thin films

被引：0

作者：

Udachan, S. ^{[1
]}

Kolavekar, S. B. ^{[1
]}

Ayachit, N. H. ^{[1
]}

Udachan, L. A. ^{[2
]}

Siddanna, S. ^{[2
]}

Kolkundi, S. S. ^{[3
]}

Kumar, K. Naveen ^{[4
,5
]}

机构：

[1] KLE Technol Univ, Sch Adv Sci, Dept Phys, Hubballi 580031, India

[2] SS Tegnoor Degree Coll, Kalaburagi 585105, India

[3] Govt First Grade Coll, Shahapur 585223, India

[4] Nitte Meenakshi Inst Technol, Dept Phys, Bangalore 560064, India

[5] Nitte Meenakshi Inst Technol, Ctr Nanomat & MEMS, Bangalore 560064, India

来源：

LOW TEMPERATURE PHYSICS | 2024年 / 50卷 / 01期

关键词：

quartz substrates; soda-lime glass; binding energy; infinitely thick film resistivity; TEMPERATURE-COEFFICIENT; RESISTIVITY; RESISTANCE;

D O I：

10.1063/10.0023890

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In thin film technology, substrate materials happen to be one of the deposition parameters that determine the physical properties of films. Hence, soda-lime glass and quartz continue to be the widely utilized substrate materials because of their high-frequency performance, price, and surface quality. For certain applications, various substrate materials that provide an acceptable compromise for the work at hand are required. Soda-lime glass and quartz have been chosen as the substrates for the tin and chromium thin films that will be produced via thermal evaporation in a vacuum. A comparative study on the electrical properties of chromium films was made in the light of Fuchs-Sondheimer and Mayadas-Shatzkes theories. Numerous physical properties, including resistivity of infinitely thick film, sticking coefficient, conduction electron mean free, etc., may be determined from resistivity-thickness data.

引用

页码：39 / 43

页数：5

共 50 条

[21] Effect of substrate temperature on the structural, optical and electrical properties of Tin Oxide thin films
Jayaprakash, R. N.
Mariappan, R.
CHALCOGENIDE LETTERS, 2021, 18 (04): : 191 - 200
[22] Electrical and structural characteristics of chromium thin films deposited on glass and alumina substrates
Kulkarni, AK
Chang, LC
THIN SOLID FILMS, 1997, 301 (1-2) : 17 - 22
[23] Study of the effect of ion implantation on the electrical and microstructural properties of tin-doped indium oxide thin films
1600, (73):
[24] INVESTIGATION OF THE OPTICAL AND ELECTRICAL PROPERTIES OF TIN SULFIDE THIN FILMS
Geetha, G.
Priya, M.
Sagadevan, S.
CHALCOGENIDE LETTERS, 2015, 12 (11): : 609 - 617
[25] Tin doped indium oxide thin films: Electrical properties
Tahar, RBH
Ban, T
Ohya, Y
Takahashi, Y
JOURNAL OF APPLIED PHYSICS, 1998, 83 (05) : 2631 - 2645
[26] Effect of alumina and chromium interlayers on microstructures and optical properties of thin Ag films on glass substrates
Sun Xi-Lian
Shao Jian-Da
CHINESE PHYSICS LETTERS, 2006, 23 (09) : 2576 - 2578
[27] Structure and electrical and physical properties of the sprayed chromium thin films
Vovk, AY
Filatov, AV
METALLOFIZIKA I NOVEISHIE TEKHNOLOGII, 1995, 17 (07): : 17 - 22
[28] SOME OPTICAL AND ELECTRICAL PROPERTIES OF THIN CHROMIUM HYDRIDE FILMS
KRYZHANO.BP
KRUGLOV, BM
OPTICS AND SPECTROSCOPY-USSR, 1970, 28 (03): : 321 - &
[29] Tin doped indium oxide thin films: electrical properties
J Appl Phys, 5 (2631):
[30] Electrical and structural properties of epitaxially deposited chromium thin films
Ohashi, M.
Sawabu, M.
Nakanishi, H.
Ohashi, K.
Maeta, K.
PHYSICA B-CONDENSED MATTER, 2018, 536 : 790 - 792

← 1 2 3 4 5 →