Comparative study on the effect of substrates on electrical properties of tin and chromium thin films

被引:0
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作者
Udachan, S. [1 ]
Kolavekar, S. B. [1 ]
Ayachit, N. H. [1 ]
Udachan, L. A. [2 ]
Siddanna, S. [2 ]
Kolkundi, S. S. [3 ]
Kumar, K. Naveen [4 ,5 ]
机构
[1] KLE Technol Univ, Sch Adv Sci, Dept Phys, Hubballi 580031, India
[2] SS Tegnoor Degree Coll, Kalaburagi 585105, India
[3] Govt First Grade Coll, Shahapur 585223, India
[4] Nitte Meenakshi Inst Technol, Dept Phys, Bangalore 560064, India
[5] Nitte Meenakshi Inst Technol, Ctr Nanomat & MEMS, Bangalore 560064, India
关键词
quartz substrates; soda-lime glass; binding energy; infinitely thick film resistivity; TEMPERATURE-COEFFICIENT; RESISTIVITY; RESISTANCE;
D O I
10.1063/10.0023890
中图分类号
O59 [应用物理学];
学科分类号
摘要
In thin film technology, substrate materials happen to be one of the deposition parameters that determine the physical properties of films. Hence, soda-lime glass and quartz continue to be the widely utilized substrate materials because of their high-frequency performance, price, and surface quality. For certain applications, various substrate materials that provide an acceptable compromise for the work at hand are required. Soda-lime glass and quartz have been chosen as the substrates for the tin and chromium thin films that will be produced via thermal evaporation in a vacuum. A comparative study on the electrical properties of chromium films was made in the light of Fuchs-Sondheimer and Mayadas-Shatzkes theories. Numerous physical properties, including resistivity of infinitely thick film, sticking coefficient, conduction electron mean free, etc., may be determined from resistivity-thickness data.
引用
收藏
页码:39 / 43
页数:5
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