Nickel-based single crystal superalloys exhibit excellent mechanical properties that make them suitable for aviation and industrial steam turbine blades. However, due to their distinguished properties, processing such materials becomes challenging. In order to enhance the fatigue life of workpiece processing, this research involved the development of a three-dimensional Hill simulation model of a single abrasive grain based on the anisotropic parameters of materials. The study also explored the formation mechanisms of the subsurface metamorphic layer of nickel-based single crystal superalloy DD5. The influence of grinding process parameters, such as wheel speed (vs), grinding depth (ap), and feed rate (vf), on the subsurface metamorphic layer of the workpiece was comparatively analyzed. In addition, the influence of the grinding process parameters on the thickness of the metamorphic layer of the (001) crystal plane of the workpiece was examined. The low damage grinding parameters of DD5 were determined to be as follows: the linear speed of the wheel speed is 35 m/s, the grinding depth is 20 mu m, and the feed rate is 0.2 m/min. Further, combining with experimental analysis, the influence of each grinding process parameter was analyzed, whereby the wheel speed was found to have the greatest influence on the metamorphic layer of the workpiece.