In recent years, the growth of high-quality MoS2 on low-cost glass substrates has attracted extensive attention due to its advantages in terms of low cost, rapid growth rate, and excellent repeatability. In this study, we systematically investigated the effect of temperature on the CVD growth of high-quality MoS2 on low-cost glass substrates. Our experimental results show that increasing the growth temperature from 900 degrees C to 1050 degrees C in the region far from the molybdenum source results in high-quality large-domain MoS2 growth, with the domain size of triangular MoS2 increasing from 109 mu m to 1.27 mm. Furthermore, in the region close to the molybdenum source, we obtained high-quality bilayer MoS2 films with a continuous region larger than 19 mm x 8 mm by increasing the growth temperature from 900 degrees C to 1050 degrees C. These results are significant for the cost-effective and high-quality synthesis of MoS2 and its potential industrial applications.
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Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R ChinaHong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Fei, Linfeng
Lei, Shuijin
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Nanchang Univ, Sch Mat Sci & Engn, Nanchang 330031, Jiangxi, Peoples R ChinaHong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Lei, Shuijin
Zhang, Wei-Bing
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Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Changsha Univ Sci & Technol, Sch Phys & Elect Sci, Changsha 410004, Hunan, Peoples R ChinaHong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Zhang, Wei-Bing
Lu, Wei
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Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R ChinaHong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Lu, Wei
Lin, Ziyuan
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Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R ChinaHong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Lin, Ziyuan
Lam, Chi Hang
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Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R ChinaHong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Lam, Chi Hang
Chai, Yang
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Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R ChinaHong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Chai, Yang
Wang, Yu
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Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Nanchang Univ, Sch Mat Sci & Engn, Nanchang 330031, Jiangxi, Peoples R ChinaHong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China