SILICON SURFACE PATTERNING BY GLOW DISCHARGE PLASMA

被引：2
|
作者：
Petrova, A. V. [1 ,2 ]
Bogoslovtseva, A. L. [1 ,2 ]
Starinskiy, S. V. [1 ,2 ]
Safonov, A. I. [1 ]
机构：
[1] Russian Acad Sci, Kutateladze Inst Thermophys, Siberian Branch, Novosibirsk, Russia
[2] Novosibirsk State Univ, Novosibirsk, Russia
来源：
JOURNAL OF APPLIED MECHANICS AND TECHNICAL PHYSICS | 2023年 / 64卷 / 03期
关键词：
glow discharge; silicon processing; oxidation; wettability; hydrophilicity; WETTABILITY; COATINGS;
D O I：
10.1134/S0021894423030136
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
The possibility of changing the silicon surface morphology at certain glow discharge parameters is shown. It is established that oxidation is the main process influencing the surface morphology during glow discharge plasma treatment. As a result of processing in the investigated parameter range, various stages of the surface oxidation process are observed: the formation of a uniform oxide layer and the formation of nano- and microstructures of silicon oxide. It is shown that these processes lead to surface modification, which acquires stable hydrophilic and superhydrophilic properties.
引用
收藏
页码：472 / 477
页数：6
相关论文
共 50 条
  • [31] Anodization of silicon and aluminum in the non-self-sustained glow discharge plasma
    Burachevskiy, Yu.A.
    Burdovitsin, V.A.
    Oks, E.M.
    Applied Physics, 2011, (02): : 23 - 26
  • [32] ELECTRONIC-PROPERTIES OF MICROCRYSTALLINE SILICON PREPARED IN THE GLOW-DISCHARGE PLASMA
    SPEAR, WE
    WILLEKE, G
    LECOMBER, PG
    PHYSICA B & C, 1983, 117 (MAR): : 908 - 913
  • [33] Anodization of aluminum and silicon in plasma of a non-self-sustained glow discharge
    Burachevsky, Yu. A.
    Burdovitsin, V. A.
    Oks, E. M.
    PLASMA PHYSICS REPORTS, 2011, 37 (13) : 1242 - 1245
  • [34] Anodization of aluminum and silicon in plasma of a non-self-sustained glow discharge
    Yu. A. Burachevsky
    V. A. Burdovitsin
    E. M. Oks
    Plasma Physics Reports, 2011, 37 : 1242 - 1245
  • [35] OXIDATION OF SILICON IN AN OXYGEN GLOW DISCHARGE
    LERTES, K
    ZEITSCHRIFT FUR ANGEWANDTE PHYSIK, 1968, 24 (03): : 147 - &
  • [36] ION BOMBARDMENT OF SILICON IN A GLOW DISCHARGE
    STRACK, H
    JOURNAL OF APPLIED PHYSICS, 1963, 34 (08) : 2405 - &
  • [37] SURFACE-TREATMENT OF POLYIMIDE FILM BY GLOW-DISCHARGE PLASMA
    LIN, OCC
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1984, 187 (APR): : 146 - INDE
  • [38] Surface modification of polythene membranes by glow discharge in argon/air plasma
    Chen, Longxi, 1600, Science Press (34):
  • [39] Surface Modification of Polymer Nanocomposites by Glow-Discharge Plasma Treatment
    Agrawal, N. K.
    Agarwal, R.
    Gautam, A. K.
    Vijay, Y. K.
    Swami, K. C.
    MATERIALS SCIENCE, 2015, 51 (01) : 68 - 75
  • [40] ADHESION PROPERTIES OF GLOW-DISCHARGE-PLASMA-TREATED POLYETHYLENE SURFACE
    KUZNETSOV, AY
    BAGRYANSKY, VA
    PETROV, AK
    JOURNAL OF APPLIED POLYMER SCIENCE, 1993, 47 (07) : 1175 - 1184
12345