Ultrasensitive and Visual Gas Pressure Sensor Based on a Tunable Fabry-Perot Resonator

被引：2
|
作者：
She, Xiaoyi [1 ,2 ]
Yang, Yang [1 ,2 ]
Shen, Yang [1 ,2 ]
Jin, Chongjun [1 ,2 ]
机构：
[1] Sun Yat Sen Univ, State Key Lab Optoelect Mat & Technol, Guangzhou Key Lab Flexible Elect Mat & Wearable D, Guangzhou 510275, Peoples R China
[2] Sun Yat Sen Univ, Sch Mat Sci & Engn, Guangzhou 510275, Peoples R China
来源：
IEEE SENSORS JOURNAL | 2023年 / 23卷 / 23期
基金：
中国国家自然科学基金;
关键词：
Fabry-Perot (FP) resonator; gas pressure sensor; palladium (Pd); suspended structure; visual sensing; MACH-ZEHNDER INTERFEROMETER; PHOTONIC CRYSTAL FIBER; TEMPERATURE;
D O I：
10.1109/JSEN.2023.3326149
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Gas pressure sensors are essential in industrial and environmental monitoring. In this study, we propose and demonstrate an ultrasensitive and visually detectable gas pressure sensor based on a tunable Fabry-Perot (FP) resonator. The FP resonator is composed of a suspended polydimethylsiloxane/palladium (PDMS/Pd) bilayer on a Pd square hole array. When subjected to external gas pressure, the suspended bilayer is concave downward and thus reduces the length of the FP cavity, resulting in a blue shift of the reflection peak. The proposed sensor exhibits an ultrahigh sensitivity of 69.6 nm/kPa above atmospheric pressure, which is easily visualized due to the large spectral shift in the visible band. In addition, this sensor has a low detection limit of 0.1 kPa and good recyclability, indicating that our sensor has great potential for low gas pressure measurement applications.
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页码：28684 / 28688
页数：5
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