Investigation on Defects in High-rate Magnetron Sputtered CoCr Coatings

被引：1
|
作者：
周浪
章守华
叶锐曾
高良
机构：
[1] Beijing University of Science and Technology China.
[2] Beijing University of Science and Technology China.
来源：
JournalofMaterialsScience&Technology | 1989年 / 05期
关键词：
CoCr coating; defect; magnetron sputtering;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Coatings obtained with magnetron sputteringexhibit a columnay structure. There are nodulardefects distributed in the coatings, which arefomed by radial growth of columnay grains ingroups. The fomation of them does not necessarilydepend on surface asperities of substrate. Thecolumnar grain boundaries are enriched in oxygen,which causes microporosity in the intercolumnarregions.
引用
收藏
页码：346 / 350
页数：5
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