Deposition of ZnO thin films on （100） γ-LiAlO2 substrate

被引：0

作者：

邹军

周圣明

张霞

苏风莲

李效民

徐军

机构：

[1] Graduate School of the Chinese Academy of Science, Beijing 100039 , Shanghai 201800 ,Anhui 100086 , Anhui 100086 ,Anhui 100086 , Shanghai 201800

[2] Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences,Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences,Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai 200050 4 Anhui University,Anhui U

来源：

ChineseOpticsLetters | 2005年 / 08期

关键词：

ZnO; LiAlO2; substrate; rate; In; Deposition of ZnO thin films on;

D O I：

暂无

中图分类号：

O472.3 []; O484.41 [];

学科分类号：

070205 ; 0803 ; 080501 ; 0809 ; 080903 ;

摘要：

Optical properties for ZnO thin films grown on (100) γ-LiAlO2 (LAO) substrate by pulsed laser deposition method were investigated. The c-axis oriented ZnO films were grown on (100) γ-LiAlO2 substrates at the substrate temperature of 550 °C. The transmittance of the films was over 85%. Peaks attributed to excitons were shown in absorption spectra, which indicated that thin films had high crystallinity. Photoluminescence spectra with the maximum peak at 540 nm were observed at room temperature, which seemed to be ascribed to oxygen vacancy in the ZnO films caused by diffusion of Li from the substrates into the films during the deposition.

引用

页码：494 / 496

页数：3

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