DDI METHOD FOR MEASURING OPTICAL CONSTANTS OF THIN FILMS

被引：0
|
作者：
谷晋骐 [1 ]
郑永星 [1 ]
机构：
[1] 天津大学应用物理系
来源：
Transactions of Tianjin University | 1997年 / 01期
关键词：
DDI; 薄膜; 光学常数;
D O I：
暂无
中图分类号：
O484.41 [];
学科分类号：
0803 ;
摘要：
双光束双波长激光干涉（ＤＤＩ）法采用自行设计的可测双波长氦氖激光器作光源，可在同一光路中通过二次测量获得薄膜样品两个波长（０．６３３μｍ，３．３９μｍ）下的光学常数，即折射率、消光系数和厚度，文中论述了调量原理、测量装置和测量结果．
引用
收藏
页码：93 / 96
页数：4
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