Numerical study on the thermo-stress of ZrO2 thermal barrier coatings by high-intensity pulsed ion beam irradiation

被引：0
|
作者：
吴迪 [1 ,2 ]
刘臣 [2 ]
朱小鹏 [2 ]
雷明凯 [2 ]
机构：
[1] College of Physical Science and Technology,Dalian University
[2] Surface Engineering Laboratory,Dalian University of Technology
来源：
Chinese Physics B | 2009年 / 18卷 / 11期
基金：
中国国家自然科学基金;
关键词：
high-intensity pulsed ion beam; ZrO2; TBCs; stress field; numerical method;
D O I：
暂无
中图分类号：
TN305 [半导体器件制造工艺及设备];
学科分类号：
1401 ;
摘要：
This paper studies numerically the thermo-mechanical effects of ZrO2 thermal barrier coatings (TBCs) irradiated by a high-intensity pulsed ion beam in consideration of the surface structure.Taking the deposited energy of ion beams in TBCs as the source term in the thermal conduction equation,the distribution of temperature in TBCs was simulated.Then,based on the distribution,the evolution of thermal stress was calculated by the finite element method.The results show that tensile radial stress formed at the valley of TBC surfaces after irradiation by HIPIB.Therefore,if cracks happen,they must be at valleys instead of peaks.As for the stress waves,no matter whether through peak or valley position,tensile and compressive stresses are present alternately inside TBCs along the depth direction,and the strength of stress decreases with time.
引用
收藏
页码：4976 / 4980
页数：5
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