Factors affecting the superconductivity in the process of depositing Nd1.85Ce0.15CuO4-δ by the pulsed electron deposition technique

On SrTiO3 single crystal substrate,by using the pulsed electron deposition tech-nique,the high-quality electron doped Nd1.85Ce0.15CuO4?δ superconducting film was successfully fabricated. After careful study on the R-T curves of the obtained sam-ples deposited with different substrate temperatures,thicknesses,annealing methods and pulse frequencies,the effects of them on the superconductivity of the films were found,and the reasons were also analyzed. Additionally,by using the same model of the pulsed laser deposition technique,the relation between the target-to-substrate distance and the deposition pressure was drawn out as a quantitative one.