Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

被引：0

作者：

Ji-jun XIONG ^{[1
,2
]}

Shi-jun ZHENG ^{[1
,2
]}

Ying-ping HONG ^{[1
,2
]}

Jun LI ^{[3
]}

Ying-lin WANG ^{[3
]}

Wei WANG ^{[1
,2
]}

Qiu-lin TAN ^{[1
,2
]}

机构：

[1] Key Laboratory of Instrumentation Science & Dynamic Measurement,North University of China

[2] The Second Research Institute of China Electronics Technology Group Corporation

[3] MOE Science and Technology on Electronic Test & Measurement Laboratory,North University of China

来源：

Frontiers of Information Technology & Electronic Engineering | 2013年 / 04期

基金：

中国国家自然科学基金;

关键词：

High temperature co-fired ceramic(HTCC); Wireless; Micro-electro-mechanical systems(MEMS);

D O I：

暂无

中图分类号：

TP211.4 []; TP212 [发送器（变换器）、传感器];

学科分类号：

080202 ; 0804 ; 080401 ; 080402 ;

摘要：

High temperature co-fired ceramics(HTCCs) have wide applications with stable mechanical properties,but they have not yet been used to fabricate sensors.By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity,the designed sensors made from HTCC materials(zirconia and 96% alumina) are fabricated,and their capacities for the pressure measurement are tested using a wireless interrogation method.Using the fabricated sensor,a study is conducted to measure the atmospheric pressure in a sealed vessel.The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm.The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.

引用

页码：258 / 263

页数：6

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