Deposition of diamond like carbon films by using a single ion gun with varying beam source

被引：0
|
作者：
姜金球
陈祝平
机构：
来源：
JournalofCoalScience&Engineering(China) | 2001年 / 01期
关键词：
ion beam deposition; diamondlike carbon; thin film; beam source; primary process;
D O I：
暂无
中图分类号：
P618.11 [煤];
学科分类号：
0709 ; 081803 ;
摘要：
Diamond like carbon films have been successfully deposited on the steel substrate, by using a single ion gun with varying beam source. The films may appear blue, yellow and transparent in color, which was found related to contaminants from the sample holder and could be avoided. The thickness of the films ranges from tens up to 200 nanometers, and the hardness is in the range 20 to 30 GPa. Raman analytical results reveal the films are in amorphous structure. The effects of different beam source on the films structure are further discussed.
引用
收藏
页码：80 / 83
页数：4
相关论文
共 50 条
  • [21] Growth of diamond-like carbon films using low energy ion beam sputter - bombardment deposition with Ar ions
    Rybachuk, M.
    Bell, J. M.
    PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY, 2008, 100
  • [22] Growth and characteristics of diamond-like carbon (DLC) films deposited by direct negative carbon ion beam deposition
    Kim, Daeil
    Jang, H. S.
    Kim, Y. S.
    Choi, D. H.
    Choi, B. K.
    Lee, J. H.
    You, Y. Z.
    Chun, H. G.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 254 (01): : 93 - 97
  • [23] Ion beam energy effects on structure and properties of diamond like carbon films deposited by closed drift ion source
    Meskinis, S.
    Kopustinskas, V.
    Tamuleviciene, A.
    Tamulevicius, S.
    Niaura, G.
    Jankauskas, J.
    Gudaitis, R.
    VACUUM, 2010, 84 (09) : 1133 - 1137
  • [24] Deposition and properties of Al-containing diamond-like carbon films by a hybrid ion beam sources
    Dai, Wei
    Wang, Aiying
    JOURNAL OF ALLOYS AND COMPOUNDS, 2011, 509 (13) : 4626 - 4631
  • [25] Deposition of nitrogen-containing diamond-like carbon films on acrylic substrates by an ion beam process
    Jan, DJ
    Ai, CF
    Lee, CC
    VACUUM, 2004, 74 (3-4) : 531 - 538
  • [26] Optical constants of diamond-like carbon films formed by gas cluster ion beam assisted deposition
    Miyamoto, Reimi
    Nishiyama, Akio
    Yoshikawa, Ryota
    Taguchi, Junji
    Komatsu, Keiji
    Saitoh, Hidetoshi
    APPLIED PHYSICS EXPRESS, 2022, 15 (03)
  • [27] The Investigation of Piezoresistive, Optical and Electrical Properties of Diamond Like Carbon Films Synthesized by Ion Beam Deposition and PECVD
    Meskinis, Sarunas
    Gudaitis, Rimas
    Tamuleviciene, Asta
    Kopustinskas, Vitoldas
    Slapikas, Kestutis
    Tamulevicius, Sigitas
    MATERIALS SCIENCE-MEDZIAGOTYRA, 2010, 16 (04): : 292 - 297
  • [28] Simulations of the structure characteristic of diamond-like carbon films formed by ion-beam-assisted deposition
    Li, ZJ
    Pan, ZY
    Zhu, J
    Wei, Q
    Wang, YX
    Zang, LK
    Zhou, L
    Liu, TJ
    ACTA PHYSICA SINICA, 2005, 54 (05) : 2233 - 2238
  • [29] Tribological properties of diamond-like carbon films prepared by mass-separated ion beam deposition
    Yamamoto, K
    Wazumi, K
    Watanabe, T
    Koga, Y
    Iijima, S
    DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) : 1130 - 1134
  • [30] Structure and properties of diamond-like carbon thin films synthesized by biased target ion beam deposition
    Niakan, H.
    Yang, Q.
    Szpunar, J. A.
    SURFACE & COATINGS TECHNOLOGY, 2013, 223 : 11 - 16
12345