Effect of substrate temperature on aligned high-density carbon nanotubes deposited by RF-PECVD

被引：0
|
作者：
张楷亮 [1 ]
林新元 [1 ]
许旺 [1 ]
苗银萍 [1 ]
胡凯 [1 ]
张勇 [1 ]
机构：
[1] Tianjin Key Laboratory of Film Electronic & Communication Devices, School of Electronics Information Engineering, Tianjin University of Technology
来源：
OptoelectronicsLetters | 2011年 / 7卷 / 02期
基金：
中国国家自然科学基金;
关键词：
Effect of substrate temperature on aligned high-density carbon nanotubes deposited by RF-PECVD; CNTs; RF; high;
D O I：
暂无
中图分类号：
TN304.055 [];
学科分类号：
0805 ; 080501 ; 080502 ; 080903 ;
摘要：
The high-density carbon nanotubes (CNTs) are synthesized on Fe/Si substrate in the mixture of acetylene and hydrogen gas by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. The effects of substrate temperature on the growth of CNTs are studied by scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy. The quality of CNTs is improved considerably by increasing the substrate temperature while the beam density is increased and graphitization degree (ID/IG) is enhanced. The best aligned CNTs are prepared at 750 oC, the beam density is about 1.6 × 103/μm2, and ID/IG is about 0.93. Temperature influence is also discussed.
引用
收藏
页码：85 / 87
页数：3
相关论文
共 50 条
  • [21] Low-temperature Growth of Vertically Aligned Carbon Nanotubes on a Glass Substrate Using Low Power PECVD
    Tabatabaei, M. K.
    Fard, H. Ghafoori
    Koohsorkhi, J.
    JOURNAL OF NANO RESEARCH, 2014, 27 : 163 - 171
  • [22] High-density and well-aligned carbon nanotubes formed by surface decomposition of SiC
    Kusunoki, M.
    Kato, H.
    APPLIED SURFACE SCIENCE, 2007, 254 (01) : 257 - 261
  • [23] Pulsed PECVD for Low-temperature Growth of Vertically Aligned Carbon Nanotubes
    Baro, Mahananda
    Gogoi, Dolly
    Pal, Arup Ratan
    Adhikary, Nirab Chandra
    Bailung, Heremba
    Chutia, Joyanti
    CHEMICAL VAPOR DEPOSITION, 2014, 20 (4-6) : 161 - 169
  • [24] High-density growth of carbon nanotubes with catalytic sites activated on nickel substrate
    Jeong, Nam-Jo
    Lee, Jung-Hoon
    Kim, Yun-Ho
    Kim, Jong-Hyu
    Kim, Hee-Yeon
    RESEARCH ON CHEMICAL INTERMEDIATES, 2008, 34 (8-9) : 761 - 766
  • [25] High-density growth of carbon nanotubes with catalytic sites activated on nickel substrate
    Nam-Jo Jeong
    Jung-Hoon Lee
    Yun-Ho Kim
    Jong-Hyu Kim
    Hee-Yeon Kim
    Research on Chemical Intermediates, 2008, 34 : 761 - 766
  • [26] Synthesis of aligned carbon nanotubes on Ni substrate at low temperature
    Wang, SG
    Wang, JH
    Wang, CX
    Man, WD
    Ma, ZB
    Zhang, BH
    CHEMICAL JOURNAL OF CHINESE UNIVERSITIES-CHINESE, 2003, 24 (07): : 1163 - 1165
  • [27] High-density growth of vertically aligned carbon nanotubes with high linearity by catalyst preheating in acetylene atmosphere
    Yoshihara, Kumiko
    Honda, Shin-ichi
    Lee, Jung-Goo
    Mori, Hirotaro
    Oura, Kenjiro
    Katayama, Mitsuhiro
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (04) : 1941 - 1943
  • [28] High-density growth of vertically aligned carbon nanotubes with high linearity by catalyst preheating in acetylene atmosphere
    Yoshihara, Kumiko
    Honda, Shin-Ichi
    Lee, Jung-Goo
    Mori, Hirotaro
    Oura, Kenjiro
    Katayama, Mitsuhiro
    Japanese Journal of Applied Physics, 2008, 47 (4 PART 1): : 1941 - 1943
  • [29] Growth of High-Density Self-Aligned Carbon Nanotubes and Nanofibers Using Palladium Catalyst
    S. Vollebregt
    J. Derakhshandeh
    R. Ishihara
    M. Y. Wu
    C. I. M. Beenakker
    Journal of Electronic Materials, 2010, 39 : 371 - 375
  • [30] Growth of High-Density Self-Aligned Carbon Nanotubes and Nanofibers Using Palladium Catalyst
    Vollebregt, S.
    Derakhshandeh, J.
    Ishihara, R.
    Wu, M. Y.
    Beenakker, C. I. M.
    JOURNAL OF ELECTRONIC MATERIALS, 2010, 39 (04) : 371 - 375
12345