A MEMS Pirani Vacuum Gauge Based on Porous Silicon

被引：0
|
作者：
Lin, Yuzhe [1 ]
Zhang, Zichao [1 ]
Tao, Jifang [1 ,2 ]
Wen, Lianggong [3 ]
机构：
[1] Shandong Univ, Sch Informat Sci & Engn, Qingdao 266237, Peoples R China
[2] Shandong Univ, Shenzhen Res Inst, Shenzhen 518063, Peoples R China
[3] Beihang Univ, Shenzhen Inst, Shenzhen 518057, Peoples R China
来源：
MICROMACHINES | 2025年 / 16卷 / 03期
关键词：
Micro-Electro-Mechanical System; Pirani vacuum gauge; porous silicon; MEMS vacuum gauge; PRESSURE SENSOR;
D O I：
10.3390/mi16030296
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Vacuum gauges based on Micro-Electro-Mechanical System (MEMS) technology have the advantages of small size, high reliability, and low cost, so they are widely used in semiconductor, chemical, laboratory, and aerospace. In this paper, a high-reliability MEMS Pirani vacuum gauge based on a porous silicon platform is designed, fabricated, and characterized. The repeatability within 4 similar to 10(5) Pa has been tested. The porous silicon acting as a support material achieved a porosity of 68% and a thermal conductivity of 3.5 W/(m center dot K), and the surface morphology of the porous silicon is smooth. The proposed MEMS Pirani vacuum gauge containing no suspended thin-film structures has good mechanical stability and is unaffected by mechanical shock and vibration in operation.
引用
收藏
页数：10
相关论文
共 50 条
  • [41] A PIRANI GAUGE CIRCUIT
    LITTING, CNW
    JOURNAL OF SCIENTIFIC INSTRUMENTS, 1955, 32 (03): : 91 - 92
  • [42] DIFFERENTIAL MICRO-PIRANI GAUGE FOR MONITORING MEMS WAFER-LEVEL PACKAGE
    Chen, Yang-Che
    Lin, Wei-Chu
    Wang, Hung-Sen
    Fan, Chen-Chih
    Lin, Keaton C. -H.
    Chou, Bruce C. S.
    Liu, Mingo C. -M.
    2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015, : 89 - 92
  • [43] A MEMS Friction Gauge For High Vacuum Measurement
    Wang, Chengxiang
    Zhang, Huzhong
    Hou, Zhanqiang
    Li, Qingsong
    Wu, Yulie
    Wu, Xuezhong
    Xiao, Dingbang
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2024, 71 (02) : 1231 - 1237
  • [44] A micro-machined Pirani gauge for vacuum measurement of ultra-small sized vacuum packaging
    Wang, Xuefang
    Liu, Chuan
    Zhang, Zhuo
    Liu, Sheng
    Luo, Xiaobing
    SENSORS AND ACTUATORS A-PHYSICAL, 2010, 161 (1-2) : 108 - 113
  • [45] Overview of the MEMS Pirani Sensors
    Xu, Shaohang
    Zhou, Na
    Shi, Meng
    Zhang, Chenchen
    Chen, Dapeng
    Mao, Haiyang
    MICROMACHINES, 2022, 13 (06)
  • [46] A FEEDBACK CONTROLLED PIRANI GAUGE
    LECK, JH
    JOURNAL OF SCIENTIFIC INSTRUMENTS, 1958, 35 (03): : 107 - 108
  • [47] Gas mixture analysis and vacuum measurement using a CMOS micromachined optical Pirani gauge
    Brown, Keith B.
    Ma, Yuan
    Lawson, Ron P.W.
    Allegretto, Walter
    Vermeulen, Fred E.
    Robinson, Alexander M.
    Canadian Journal of Electrical and Computer Engineering, 2002, 27 (01) : 27 - 31
  • [48] FAST, THERMOSTATIC, PIRANI GAUGE
    MILNER, CJ
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1983, 54 (07): : 890 - 893
  • [49] MEMS applications of porous silicon
    Benecke, W
    Splinter, A
    DEVICE AND PROCESS TECHNOLOGIES FOR MEMS AND MICROELECTRONICS II, 2001, 4592 : 76 - 87
  • [50] EXTENDED RANGE PIRANI GAUGE
    SMITH, AW
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1959, 30 (06): : 485 - 486
12345