Cu-Cu joint formation by sintering of self-reducible Cu nanoparticle paste assisted by MOD under air condition

被引:0
|
作者
Yuan, Yulei [1 ,2 ]
Liu, Xun [1 ,3 ]
Li, Junjie [1 ]
Zhu, Pengli [1 ]
Sun, Rong [1 ]
机构
[1] Chinese Acad Sci, Shenzhen Inst Adv Technol, Shenzhen Inst Adv Elect Mat, Shenzhen, Peoples R China
[2] Univ Sci & Techol China, Nano Sci & Technol Inst, Suzhou, Peoples R China
[3] Wuhan Univ Technol, Sch Mat Sci & Engn, Wuhan, Peoples R China
基金
中国国家自然科学基金;
关键词
Copper nanoparticles; MOD; Cu-Cu bonding joints; sintering; CONDUCTIVE PATTERNS; HIGH-TEMPERATURE; REDUCTION;
D O I
10.1109/CEPT52650.2021.9568046
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
As the electronics industry develops, semiconductor devices increasingly tend to be used in high temperature application. Higher working temperature also puts forward new requirement for die-attach materials, copper nanoparticles (Cu NPs) have shown great promise as a die-attach material due to its excellent thermal and electrical conductivities. However, Cu NPs are easily oxidized. In this article, we introduce a self-reducible Cu NPs paste compose of Cu-based MOD, reducing solvent and commercial Cu NPs (100 nm), and the sintered joints can achieve high shear strength in air. The copper produced by the decomposition of self-reducible MOD helps sintering between copper nanoparticles and has a certain effect of inhibiting oxidation. The influence of MOD content on shear strength and sintered layer structure was explored. Finally, reliable Cu-Cu joints with a shear strength of 20.47 MPa was achieved with 250 degrees C bonding for 15 min in air. This novel Cu NPs paste is promised to be used as a bonding material for electronic packaging and provides a new method for copper sintering in air.
引用
收藏
页数:4
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