Two-photon lithography for integrated photonic packaging

被引:12
|
作者
Yu, Shaoliang [1 ]
Du, Qingyang [1 ]
Mendonca, Cleber Renato [2 ,3 ]
Ranno, Luigi [2 ]
Gu, Tian [2 ,4 ]
Hu, Juejun [4 ]
机构
[1] Zhejiang Lab, Hangzhou 311100, Peoples R China
[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
[3] Univ Sao Paulo, Sao Carlos Inst Phys, BR-13560970 Sao Carlos, SP, Brazil
[4] MIT, Mat Res Lab, Cambridge, MA 02139 USA
来源
LIGHT-ADVANCED MANUFACTURING | 2023年 / 4卷 / 04期
基金
国家重点研发计划;
关键词
Photonic packaging; Two-photon lithography; Photonic wire bonding; Microoptics; Integrated photonics; REFRACTIVE-INDEX; OPTICAL-PROPERTIES; WAVE-GUIDES; POLYMERIZATION; FABRICATION; CIRCUITS; UV; MICROFABRICATION; MICROSTRUCTURES; NANOCOMPOSITE;
D O I
10.37188/lam.2023.032
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Photonic integrated circuits (PICs) have long been considered as disruptive platforms that revolutionize optics. Building on the mature industrial foundry infrastructure for electronic integrated circuit fabrication, the manufacturing of PICs has made remarkable progress. However, the packaging of PICs has often become a major barrier impeding their scalable deployment owing to their tight optical alignment tolerance, and hence, the requirement for specialty packaging instruments. Two-photon lithography (TPL), a laser direct-write three-dimensional (3-D) patterning technique with deep subwavelength resolution, has emerged as a promising solution for integrated photonics packaging. This study provides an overview of the technology, emphasizing the latest advances in TPL-enabled packaging schemes and their prospects for adoption in the mainstream photonic industry.
引用
收藏
页数:17
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