Two-photon lithography for integrated photonic packaging

被引:12
|
作者
Yu, Shaoliang [1 ]
Du, Qingyang [1 ]
Mendonca, Cleber Renato [2 ,3 ]
Ranno, Luigi [2 ]
Gu, Tian [2 ,4 ]
Hu, Juejun [4 ]
机构
[1] Zhejiang Lab, Hangzhou 311100, Peoples R China
[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
[3] Univ Sao Paulo, Sao Carlos Inst Phys, BR-13560970 Sao Carlos, SP, Brazil
[4] MIT, Mat Res Lab, Cambridge, MA 02139 USA
来源
LIGHT-ADVANCED MANUFACTURING | 2023年 / 4卷 / 04期
基金
国家重点研发计划;
关键词
Photonic packaging; Two-photon lithography; Photonic wire bonding; Microoptics; Integrated photonics; REFRACTIVE-INDEX; OPTICAL-PROPERTIES; WAVE-GUIDES; POLYMERIZATION; FABRICATION; CIRCUITS; UV; MICROFABRICATION; MICROSTRUCTURES; NANOCOMPOSITE;
D O I
10.37188/lam.2023.032
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Photonic integrated circuits (PICs) have long been considered as disruptive platforms that revolutionize optics. Building on the mature industrial foundry infrastructure for electronic integrated circuit fabrication, the manufacturing of PICs has made remarkable progress. However, the packaging of PICs has often become a major barrier impeding their scalable deployment owing to their tight optical alignment tolerance, and hence, the requirement for specialty packaging instruments. Two-photon lithography (TPL), a laser direct-write three-dimensional (3-D) patterning technique with deep subwavelength resolution, has emerged as a promising solution for integrated photonics packaging. This study provides an overview of the technology, emphasizing the latest advances in TPL-enabled packaging schemes and their prospects for adoption in the mainstream photonic industry.
引用
收藏
页数:17
相关论文
共 50 条
  • [1] Demonstration of two-photon lithography
    Schwarz, CJ
    Nampoothiri, AVV
    Jasapara, JC
    Rudolph, W
    Brueck, SRJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06): : 2362 - 2365
  • [2] Photonic crystals with defect structures fabricated through a combination of holographic lithography and two-photon lithography
    Ohlinger, Kris
    Torres, Faraon
    Lin, Yuankun
    Lozano, Karen
    Xu, Di
    Chen, Kevin P.
    JOURNAL OF APPLIED PHYSICS, 2010, 108 (07)
  • [3] Two-photon laser lithography of photonic microstructures in photoresist SU-8
    Mizeikis, V
    Seet, KK
    Juodkazis, S
    Jarutis, V
    Misawa, H
    2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, 2005, : 1037 - 1038
  • [4] Two-photon diffraction and quantum lithography
    D'Angelo, M
    Chekhova, MV
    Shih, Y
    PHYSICAL REVIEW LETTERS, 2001, 87 (01)
  • [5] Two-Photon Continuous Flow Lithography
    Laza, Simona C.
    Polo, Marco
    Neves, Antonio A. R.
    Cingolani, Roberto
    Camposeo, Andrea
    Pisignano, Dario
    ADVANCED MATERIALS, 2012, 24 (10) : 1304 - 1308
  • [6] Improvement of two-photon absorption lithography
    Shibuya, M
    Ezaki, H
    OPTICAL MICROLITHOGRAPHY XV, PTS 1 AND 2, 2002, 4691 : 1584 - 1591
  • [7] Photonic Wire Bonding via Two-Photon Polymerization Laser Lithography for Hybrid Integration
    Rosborough, Victoria
    Grant, Hannah
    Musolf, Juergen
    Garrett, Henry
    McFarlane, Jessica
    Wagner, Sabrina
    Shimamura, Amalu
    Morrison, Gordon
    Johansson, Leif
    INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXVII, 2023, 12424
  • [8] Two-photon fabrication of photonic crystals by single-beam laser holographic lithography
    Zhong, Yongchun
    Zhou, Jianying
    Wong, Kam Sing
    JOURNAL OF APPLIED PHYSICS, 2010, 107 (07)
  • [9] Fabrication of photonic crystal by two-photon single-beam laser holographic lithography
    Zhong, Yongchun
    Wong, Kam Sing
    2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, : 2005 - 2006
  • [10] Two-photon subwavelength lithography with thermal light
    Cao, De-Zhong
    Ge, Gui-Ju
    Wang, Kaige
    APPLIED PHYSICS LETTERS, 2010, 97 (05)