共 50 条
- [21] A fast and low-power microelectromechanical system-based non-volatile memory device Nature Communications, 2
- [23] Novel structure and fabrication process for integrated RF microelectromechanical-system technology JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (9A): : 6849 - 6853
- [25] System-Based Coaching Technology Mechanism for the Development of Educational Systems SUSTAINABILITY, 2019, 11 (03):
- [26] The novel deflector for multi arrayed microcolumn using microelectromechanical system (MEMS) technology JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (6B): : 4084 - 4088
- [30] Vibrational energy harvesting with microelectromechanical system technology NTT Technical Review, 2013, 11 (02):