A high-temperature resistant curved conformal thin-film polymer derived SiCN temperature sensor based on screen printing

Curved high-temperature applications, such as aircraft engine turbine blades and automobile engine exhausts, require accurate and rapid temperature measurements. Despite this need, preparing thin-film temperature sensors on complex curved surfaces remains challenging. It is hypothesized that a flexible screen-printing-based method can effectively fabricate conformal high-temperature sensors on such surfaces. In this study, a method using carbon dioxide laser scanning is employed to carbonize one-sided adhesive polyimide (PI) thin-film tapes, creating flexible stencils. The investigation focuses on the effects of laser power, scanning speed, and the number of scans on the morphology of PI stencil mesh edges, as well as examining the influence of PI stencil thickness and scanning width on mesh dimensions. Optimal laser process parameters are identified for producing stencils with clear mesh edges across various thicknesses. The results demonstrate that the fabricated curved hightemperature thin-film temperature sensors exhibit excellent reproducibility and stability, enduring temperatures up to 900 degrees C. It is concluded that this process not only enables the production of high-performance PDC thin-film temperature sensors but also extends to other high-temperature sensors and flexible electronic devices.