DESIGN AND MANUFACTURE OF MEMS DEFORMABLE MIRROR BASED ON PIEZOELECTRIC ACTUATOR WITH 61 ELECTRODES

This paper designs and fabricates a MEMS deformable mirror with 61 electrodes driven by piezoelectric thin films (PZT). Initially, the structural design and MEMS process scheme for the proposed deformable mirror are determined. The designed deformable mirror effectively corrects wavefront aberrations. Experimental measurements of surface deformation displacement for deformable mirrors with different electrodes are conducted, indicating minimal coupling effects among the designed deformable mirror electrodes. The applied voltage and displacement response exhibit favorable linearity. Finally, based on the Zernike matrix model, the mirror surface shape is controlled, and Zernike polynomials of orders 2-4 are fitted. The results demonstrate that the deformable mirror has a high correction efficiency for low-order aberrations.