共 50 条
- [42] Electrostatic membrane deformable mirror wavefront control systems: Design and analysis ADVANCED WAVEFRONT CONTROL: METHODS, DEVICES, AND APPLICATIONS II, 2004, 5553 : 28 - 38
- [44] Fabrication of an electrothermally actuated electrostatic microgripper BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 552 - 555
- [45] A magnetically actuated MEMS scanning mirror MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS, 1996, 2687 : 47 - 52
- [46] A Design of Thermo-Electrostatic Actuated Microelectromechanical Switch with Low Voltage and Fabrication Efforts MEMS, NANO AND SMART SYSTEMS, PTS 1-6, 2012, 403-408 : 3791 - 3796
- [47] Wavelength Tuning and Controlled Temperature Dependence of MEMS VCSELs with Thermally and Electrostatically Actuated Micromachined Mirror 2013 18TH MICROOPTICS CONFERENCE (MOC), 2013,
- [49] Hollow wheel actuated internal gear pumps - Drive concept, design and test 2013, VDI Fachmedien GmBbH & Co. (65):
- [50] Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space IMAGING TECHNOLOGY AND TELESCOPES, 2000, 4091 : 83 - 89