共 50 条
- [21] Conductive Behavior Modeling of Dual-axis CMOS MEMS Convective Accelerometers Using 3D FEM and Spherical Model 2013 10TH INTERNATIONAL MULTI-CONFERENCE ON SYSTEMS, SIGNALS & DEVICES (SSD), 2013,
- [22] Large diameter dual-axis MEMS-based mirror for laser beam steering MOEMS AND MINIATURIZED SYSTEMS X, 2011, 7930
- [23] CMOS MEMS lorentz force dual-axis scanning-stage 2007 2ND IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2007, : 303 - +
- [24] A CMOS-MEMS Single-chip Dual-axis Gyroscope IMPACT: 2009 4TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE, 2009, : 271 - 274
- [25] Signal detection of bulk-silicon capacitive dual-axis micro-accelerometers 2007 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS I-V, CONFERENCE PROCEEDINGS, 2007, : 1862 - +
- [26] In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity 2020 7TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2020), 2020,
- [27] An error analysis and efficient calibration method for 6 DOF acceleration sensor systems using multiple dual-axis accelerometers Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 2008, 74 (03): : 626 - 632