Enhanced Responsivity of Solar Blind Ultraviolet Photodetector by PEALD Deposited Zn-Doped Ga2O3Thin Films

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Xiamen Institute of Measurement and Testing, National Measurement and Testing Center for Flat Panel Display Industry, Xiamen [1 ]
361024, China
不详 [2 ]
350108, China
不详 [3 ]
36063, Taiwan
不详 [4 ]
54561, Taiwan
不详 [5 ]
361026, China
不详 [6 ]
51591, Taiwan
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IEEE Trans. Electron Devices | / 1卷 / 664-669期
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