共 50 条
- [33] Damage-free vibrational spectroscopy of biological materials in the electron microscope NATURE COMMUNICATIONS, 2016, 7
- [35] DAMAGE-FREE PLASMA ETCHING PROCESSES FOR FUTURE NANOSCALE DEVICES IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, : 112 - 119
- [36] Damage-free vibrational spectroscopy of biological materials in the electron microscope Nature Communications, 7
- [37] Damage-Free Plasma Source for Atomic-Scale Processing NANO LETTERS, 2024, 24 (37) : 11462 - 11468
- [38] Damage-Free Design of Megasonic Waveguide for Single Wafer Process CLEANING AND SURFACE CONDITIONING TECHNOLOGY IN SEMICONDUCTOR DEVICE MANUFACTURING 11, 2009, 25 (05): : 303 - 309
- [39] Damage-free wafer cleaning by water and gas mixture jet ISSM 2005: IEEE International Symposium on Semiconductor Manufacturing, Conference Proceedings, 2005, : 219 - 222
- [40] Damage-free surface modification of hexagonal silicon carbide wafers SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2, 2000, 338-3 : 845 - 848