Properties of tantalum pentoxide (Ta2O5) obtained by plasma assisted deposition using a TaF5 source

被引：0
|
作者：
Four, S.
Devine, R.A.B.
Luo, E.Z.
Wilson, I.H.
Cheng, H.S.
机构：
来源：
Journal of Non-Crystalline Solids | 1999年 / 254卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：139 / 145
相关论文
共 50 条
  • [21] Extraction of Tantalum from Ta2O5 Using SOM Process
    Chen, Chao Yi
    Lv, Ying Lu
    Li, Jun Qi
    MATERIAL DESIGN, PROCESSING AND APPLICATIONS, PARTS 1-4, 2013, 690-693 : 25 - +
  • [22] CONDUCTION MECHANISM OF TANTALUM OXIDE (TA2O5)
    BRAMBILLA, E
    PIACENTINI, GF
    ELETTROTECNICA, 1977, 64 (08): : 661 - 662
  • [23] TANTALUM METAL BY BOMB REDUCTION OF TA2O5
    BERGMAN, RM
    SCHMIDT, FA
    WILHELM, HA
    JOURNAL OF METALS, 1968, 20 (12): : A46 - &
  • [24] TANTALUM CARBIDE FORMED BY CARBONIZATION OF TA2O5 IN AN ARGON PLASMA ARC
    MATSUMOTO, O
    SAITO, M
    BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, 1975, 48 (01) : 351 - 352
  • [25] STRUCTURAL AND ELECTRICAL-PROPERTIES OF TA2O5 GROWN BY THE PLASMA-ENHANCED LIQUID SOURCE CVD USING PENTA-ETHOXY TANTALUM SOURCE
    MURAWALA, PA
    SAWAI, M
    TATSUTA, T
    TSUJI, O
    FUJITA, S
    FUJITA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (1B): : 368 - 375
  • [26] Preparation and Antibacterial Properties of Ta2O5 Nanorods Doped with Copper on Tantalum
    Wang Cuicui
    Li Xinyu
    Tong Chenguang
    Cai Anqi
    Guo Hongwei
    Yin Hairong
    RARE METAL MATERIALS AND ENGINEERING, 2020, 49 (09) : 3163 - 3169
  • [27] Preparation and Antibacterial Properties of Ta2O5 Nanorods Doped with Copper on Tantalum
    Wang, Cuicui
    Li, Xinyu
    Tong, Chenguang
    Cai, Anqi
    Guo, Hongwei
    Yin, Hairong
    Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2020, 49 (09): : 3163 - 3169
  • [28] Atomic layer deposition of MgF2 thin films using TaF5 as a novel fluorine source
    Pilvi, Tero
    Puukilainen, Esa
    Kreissig, Ulrich
    Leskelae, Markku
    Ritala, Mikko
    CHEMISTRY OF MATERIALS, 2008, 20 (15) : 5023 - 5028
  • [29] DISSOLUTION OF ANODIC TA2O5 LAYERS INTO POLYCRYSTALLINE TANTALUM
    GIBER, J
    OECHSNER, H
    THIN SOLID FILMS, 1985, 131 (3-4) : 279 - 287
  • [30] Direct Preparation of Tantalum Metal from Ta2O5
    Chen, Chao Yi
    Li, Jun Qi
    Lu, Xiong Gang
    APPLIED MECHANICS AND MATERIALS I, PTS 1-3, 2013, 275-277 : 2312 - +
12345