Temperature measurements of semiconductor wafers via laser thermometer with fiber optic communication line

被引：0
|
作者：
Lukin, O.V. [1 ]
Magunov, Alexander N. [1 ]
机构：
[1] Inst. of Microelectronics, Yaroslavl, Russia
来源：
Proceedings of SPIE - The International Society for Optical Engineering | 1994年 / 2321卷
关键词：
Temperature measurement;
D O I：
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学科分类号：
摘要：
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页码：439 / 442
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