Future trends for large-area pulsed laser deposition

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作者：
Greer, J.A. [1 ]
Tabat, M.D. [1 ]
Lu, C. [1 ]
机构：
[1] PVD Products Inc, Bedford, United States
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 121卷 / 1-4期
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页码：357 / 362
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