DEVELOPMENT OF A HIGH RESOLUTION IN-PROCESS SENSOR FOR SURFACE ROUGHNESS BY LASER BEAM.

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作者
Mitsuki, Kimiyuki [1 ]
Ozawa, Norimitsu [1 ]
Kohno, Tsuguo [1 ]
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[1] Mechanical Engineering Lab, Sakura-mura, Jpn, Mechanical Engineering Lab, Sakura-mura, Jpn
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| 1600年 / 19期
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