How reliable are automatic gas valves?

被引：0
|
作者：
Periasamy, Ravindran [1 ]
Clayton, Anthony C. [1 ]
Ensor, David S. [1 ]
Messner, Michael [1 ]
Riddle, Jeff [1 ]
机构：
[1] Intel
来源：
Microcontamination | 1995年 / 13卷 / 01期
关键词：
Automatic gas valve - Cycle life test method - Gas distribution system;
D O I：
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学科分类号：
摘要：
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