Silicon-hydrogen bonds in laser-crystallized polysilicon thin films and their effects on electron mobility

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作者：
Kitahara, Kuninori [1 ]
Hara, Akito [1 ]
Nakajima, Kazuo [1 ]
Okabe, Masahiro [1 ]
机构：
[1] Shimane Univ, Matsue, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 3 A期
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页码：1320 / 1325
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