Surface and interface study of titanium nitride on Si substrate produced by dynamic ion beam mixing method

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[1] Beag, Young Whoan
[2] Tarutani, Masayoshi
[3] Min, Kyung-youl
[4] Kiuchi, Masato
[5] Shimizu, Ryuichi
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Beag, Young Whoan | 1600年 / JJAP, Minato-ku, Japan卷 / 33期
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