Surface and interface study of titanium nitride on Si substrate produced by dynamic ion beam mixing method

被引：0
|
作者：
机构：
[1] Beag, Young Whoan
[2] Tarutani, Masayoshi
[3] Min, Kyung-youl
[4] Kiuchi, Masato
[5] Shimizu, Ryuichi
来源：
Beag, Young Whoan | 1600年 / JJAP, Minato-ku, Japan卷 / 33期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] SURFACE AND INTERFACE STUDY OF TITANIUM NITRIDE ON SI SUBSTRATE PRODUCED BY DYNAMIC ION-BEAM MIXING METHOD
    BEAG, YW
    TARUTANI, M
    MIN, K
    KIUCHI, M
    SHIMIZU, R
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (4A): : 2025 - 2030
  • [2] TITANIUM NITRIDE FILM FORMATION BY THE DYNAMIC ION-BEAM MIXING METHOD
    NAKAGAWA, Y
    OHTANI, S
    NAKATA, T
    MIKODA, M
    TAKAGI, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1402 - 1405
  • [3] Tribological properties of titanium nitride films prepared by dynamic ion beam mixing method
    Nagasaka, H.
    Chayahara, A.
    Fujii, K.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1997, 121 (1-4): : 279 - 282
  • [4] Tribological properties of titanium nitride films prepared by dynamic ion beam mixing method
    Nagasaka, H
    Chayahara, A
    Fujii, K
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4): : 279 - 282
  • [5] MICROSTRUCTURE OF TITANIUM NITRIDE FILMS PRODUCED BY THE DYNAMIC MIXING METHOD
    KIUCHI, M
    FUJII, K
    TANAKA, T
    SATOU, M
    FUJIMOTO, F
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4): : 649 - 652
  • [6] A study of the tribological characteristics of titanium nitride film prepared by the dynamic ion beam mixing method for application on sliding bearings
    Nagasaka, H
    Koizumi, T
    MATERIALS MODIFICATION AND SYNTHESIS BY ION BEAM PROCESSING, 1997, 438 : 651 - 656
  • [7] THE PROPERTIES OF TITANIUM NITRIDE PREPARED BY DYNAMIC ION MIXING
    NAGASAKA, H
    TSUCHIYA, N
    KIUCHI, M
    CHAYAHARA, A
    FUJII, K
    SATOU, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1380 - 1383
  • [8] Ion beam induced mixing at Co/Si interface
    Agarwal, Garima
    Sharma, Pratibha
    Jain, Ankur
    Lal, Chhagan
    Kabiraj, D.
    Jain, I. P.
    VACUUM, 2008, 83 (02) : 397 - 400
  • [9] THIN HYDROXYAPATITE COATING PRODUCED BY THE ION-BEAM DYNAMIC MIXING METHOD
    YOSHINARI, M
    OHTSUKA, Y
    DERAND, T
    BIOMATERIALS, 1994, 15 (07) : 529 - 535
  • [10] Nanoscale Layers Formed on the Surface of a Titanium Alloy by the Ion-Beam Mixing of Carbon with a Substrate
    V. L. Vorob’ev
    F. Z. Gilmutdinov
    P. V. Bykov
    V. Ya. Bayankin
    I. G. Pospelova
    I. T. Russkikh
    Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2019, 13 : 979 - 984
12345