Ti thickness effects in Pt/Ti bottom electrode on properties of (Ba,Sr)TiO3 thin film

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作者
Cha, Seon Yong [1 ]
Lee, Seung Hoon [1 ]
Lee, Hee Chul [1 ]
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[1] Korea Advanced Inst of Science and, Technology, Taejon, Korea, Republic of
来源
Integrated Ferroelectrics | 1997年 / 16卷 / 1 -4 pt 3期
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页码:183 / 190
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