RF-sputter deposition of Si-Fe-N ternary thin films and their thermal annealing for granular magnetic films

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作者：
Kikkawa, Shinichi [1 ]
Sugiyama, Hideyuki [1 ]
Takahashi, Masao [1 ]
机构：
[1] Osaka Univ, Ibaraki, Japan
来源：
Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy | 1998年 / 45卷 / 01期
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页码：63 / 67
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