Ion-Beam-Etched Pyroelectric High-Detectivity Sensors Based on LiNbO3.

被引：0
|
作者：
Norkus, V.
Krauss, M.
Hofmann, G.
机构：
来源：
Feingeratetechnik Berlin | 1983年 / 32卷 / 11期
关键词：
FERROELECTRIC MATERIALS - Etching - ION BEAMS - Applications;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Self-supporting pyroelectric LiNbO//3 wafers with an extremely small thickness of the sensitive element (4 to 7 mu m) were produced by means of ion beam etching after practical optimization of the technological parameters with regard to a high etching rate, and thus infrared radiation detectors with a high specific detectivity were synthesized.
引用
收藏
页码：496 / 498
相关论文
共 24 条
  • [1] ION-BEAM MILLED, HIGH-DETECTIVITY PYROELECTRIC DETECTORS
    STOKOWSKI, SE
    VENABLES, JD
    BYER, NE
    ENSIGN, TC
    INFRARED PHYSICS, 1976, 16 (03): : 331 - 334
  • [2] REACTIVE ION BEAM ETCHING CHARACTERISTIC OF LiNbO3.
    Ren, Congxin
    Jie, Yang
    Yanfang, Zheng
    Lizhi, Chen
    Guoliang, Chen
    Shichang, Tsou
    1600, (B19-20):
  • [3] Ion-beam-etched laser facets for InP-based lasers
    Deutsche Telekom AG, Darmstadt, Germany
    Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 12 A (7224-7229):
  • [4] Ion-beam-etched laser facets for InP-based lasers
    Vollrath, G
    Schlachetzki, A
    Kuphal, E
    Fiedler, F
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (12A): : 7224 - 7229
  • [5] High-detectivity photodetectors based on CsPbCl3/Au heterostructures
    Wang, Yu
    Xu, Yushi
    Jin, Jiyou
    You, Jiawang
    Wang, Wenxiang
    Wei, Zheng
    Impundu, Julienne
    Chu, Weiguo
    Sun, Lianfeng
    Wei, Hang
    Xue, Mei
    Li, Yong Jun
    MATERIALS LETTERS, 2024, 365
  • [6] Ion-beam-etched profile control of MTJ cells for improving the switching characteristics of high-density MRAM
    Takahashi, Shigeki
    Kai, Tasashi
    Shimomura, Naoharu
    Ueda, Tomomasu
    Amano, Minoru
    Yoshikawa, Masatoshi
    Kitagawa, Eiji
    Asao, Yoshiaki
    Ikegawa, Sumio
    Kishi, Tatsuya
    Yoda, Hiroaki
    Nagahara, Kiyokazu
    Mukai, Tomonori
    Hada, Hiromitsu
    IEEE TRANSACTIONS ON MAGNETICS, 2006, 42 (10) : 2745 - 2747
  • [7] High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region
    Lin, Hui
    Zhang, Lichao
    Li, Lifeng
    Jin, Chunshui
    Zhou, Hongjun
    Huo, Tonglin
    OPTICS LETTERS, 2008, 33 (05) : 485 - 487
  • [8] Pushing the Limits of LiNbO3-based High Temperature SAW Sensors
    Maufay, Jordan
    Youbi, Ulrich
    Aubert, Thierry
    Kokanyan, Ninel
    Hage-Ali, Sami
    Vilasi, Michel
    Elmazria, Omar
    2021 IEEE SENSORS, 2021,
  • [9] LiNbO3-Based SAW Sensors Capable to Measure up to 1100°C High Temperature
    Weng, Haotian
    Duan, Franklin Li
    Xie, Ziyi
    Liu, Siqing
    Ji, Zhonglin
    Zhang, Yafei
    IEEE SENSORS JOURNAL, 2020, 20 (21) : 12679 - 12683
  • [10] High-detectivity solar-blind deep UV photodetectors based on cubic/monoclinic mixed-phase (InxGa1_x)2O3 thin films
    Qi, Kai
    Fu, Shihao
    Wang, Yuefei
    Han, Yurui
    Fu, Rongpeng
    Gao, Chong
    Ma, Jiangang
    Xu, Haiyang
    Li, Bingsheng
    Shen, Aidong
    Liu, Yichun
    JOURNAL OF ALLOYS AND COMPOUNDS, 2023, 965
123