Real-time monitoring and control during MBE growth of GaAs/AlGaAs Bragg reflectors using multi-wavelength ellipsometry

被引：0
|
作者：
J.A. Woollam Co, Lincoln, United States [1 ]
机构：
来源：
Mater Sci Eng B Solid State Adv Technol | / 1-3卷 / 134-138期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] CORRELATIVITY OF ATMOSPHERIC EXTINCTION COEFFICIENT AND REAL-TIME INVERSION COMPUTATION FOR MULTI-WAVELENGTH LASER
    Wu Rong-Hua
    Wang Jiang-An
    Kang Sheng
    Ren Xi-Chuang
    JOURNAL OF INFRARED AND MILLIMETER WAVES, 2009, 28 (03) : 224 - 228
  • [42] MBE growth of oxide superconductor films using real-time atomic absorption composition control
    Schlom, DG
    Theis, CD
    Lettieri, JP
    Hanei, JH
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1998, 215 : U691 - U692
  • [43] In situ real-time analysis of the MBE growth of CdTe on Ge: A comparison of ellipsometry data analysis techniques
    Badano, G.
    Ballet, P.
    Baudry, X.
    Zanatta, J. P.
    Million, A.
    JOURNAL OF CRYSTAL GROWTH, 2006, 296 (02) : 129 - 134
  • [44] Real time in-situ thickness control of Fabry-Perot cavities in MBE by 44 and 88 wavelength ellipsometry
    Kuo, CH
    Boonzaayer, MD
    DeHerrera, MF
    Schroder, DK
    Maracas, GN
    Johs, B
    JOURNAL OF CRYSTAL GROWTH, 1997, 175 : 281 - 285
  • [45] Real-time observation of ellipsometry oscillation during GaAs layer by layer growth by metalorganic vapor-phase epitaxy
    Lee, JS
    Sugou, S
    Masumoto, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1999, 38 (6AB): : L614 - L616
  • [46] Real-time observation of ellipsometry oscillation during GaAs layer by layer growth by metalorganic vapor-phase epitaxy
    Lee, Jeong-Sik
    Sugou, Shigeo
    Masumoto, Yasuaki
    Japanese Journal of Applied Physics, Part 2: Letters, 1999, 38 (6 A/B):
  • [47] REAL-TIME LASER-LIGHT SCATTERING STUDIES OF SURFACE-TOPOGRAPHY DEVELOPMENT DURING GAAS MBE GROWTH
    SMITH, GW
    PIDDUCK, AJ
    WHITEHOUSE, CR
    GLASPER, JL
    SPOWART, J
    JOURNAL OF CRYSTAL GROWTH, 1993, 127 (1-4) : 966 - 971
  • [48] Transfer-learning-based multi-wavelength laser sensor for high fidelity and real-time monitoring of ambient temperature and humidity
    Ma, Liuhao
    Hu, Weifan
    Wang, Wei
    Wang, Yu
    APPLIED OPTICS, 2023, 62 (22) : 5932 - 5945
  • [49] REAL-TIME MONITORING OF THE DEPOSITION AND GROWTH OF THIN ORGANIC FILMS BY IN-SITU ELLIPSOMETRY
    WALL, JF
    CLAUBERG, E
    MURRAY, RW
    IRENE, EA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (05): : 2348 - 2354
  • [50] Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring
    Urban, FK
    Comfort, JC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (04): : 2331 - 2336
12345