Chemical-mechanical polishing of low-dielectric-constant spin-on-glasses: Film chemistries, slurry formulation and polish selectivity

被引：0
|
作者：
Wang, Y.-L. [1 ]
Liu, C. [1 ]
Chang, S.-T. [1 ]
Tsai, M.-S. [1 ]
Feng, M.-S. [1 ]
Tseng, W.-T. [1 ]
机构：
[1] Chiao-Tung Univ, Hsin-Chu, Taiwan
来源：
Thin Solid Films | 1997年 / 308-309卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：550 / 554
相关论文
共 26 条
  • [21] Highly Selective Polishing Rate Between a Tungsten Film and a Silicon-Dioxide Film by Using a Malic-Acid Selectivity Agent in Tungsten-Film Chemical-Mechanical Planarization
    Seo, Eun-Bin
    Park, Jea-Gun
    Bae, Jae-Young
    Park, Jin-Hyung
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2020, 76 (12) : 1127 - 1132
  • [22] Mechanism of mechanical and chemical polishing in low dielectric constant plasma-enhanced chemical vapor deposition SiOC layer from hexamethyldisiloxane
    Hara, T
    Togoh, F
    Kurosu, T
    Sakamoto, K
    Shioya, Y
    Ishimaru, T
    Doy, TK
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2001, 4 (08) : G65 - G67
  • [23] Study on factors in time-dependent dielectric breakdown degradation of Cu/Low-k integration related to Cu chemical-mechanical polishing
    Yamada, Yohei
    Konishi, Nobuhiro
    Noguchi, Junji
    Jimbo, Tomoko
    Kurokawa, Syuhei
    Doi, Toshiro
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (06) : 4469 - 4474
  • [24] Evaluation of Dielectric Constant through Direct Chemical Mechanical Planarization of Porous Low-k Film
    Kodera, Masako
    Takahashi, Takumi
    Mimamihaba, Gaku
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (04)
  • [25] Effects of manganese oxide-mixed abrasive slurry on the tetraethyl orthosilicate oxide chemical mechanical polishing for planarization of interlayer dielectric film in the multilevel interconnection
    Seo, Yong-Jin
    Park, Sung-Woo
    Lee, Woo-Sun
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2008, 26 (04): : 996 - 1001
  • [26] Nano-Mechanical Analyses of Low-Dielectric-Constant SiOC(-H) Thin Films Deposited by Using Plasma-Enhanced Chemical-Vapor Deposition
    Jung, An Soo
    Kim, Chang Young
    Navamathavan, R.
    Choi, Chi Kyu
    Woo, Jong-Kwan
    Lee, Kwang-Man
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2008, 53 (05) : 2512 - 2517
123