Focused ion beam milling technology for on-chip wiring modification system for LSI

被引：0
|
作者：
Itoh, Fumikazu
Shimase, Akira
Haraichi, Satoshi
Takahashi, Takahiko
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 1992年 / 58卷 / 07期
关键词：
604.2 Machining Operations - 701.2 Magnetism: Basic Concepts and Phenomena - 713.5 Other Electronic Circuits - 721.2 Logic Elements - 932.1 High Energy Physics;
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学科分类号：
摘要：
10
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页码：1161 / 1166
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