VACUUM ULTRAVIOLET LIGHT SOURCE USING ELECTRODELESS DISCHARGE.

被引：0
|
作者：
Shao, Chun-Lin [1 ]
Jimbo, Takashi [1 ]
Umeno, Masayoshi [1 ]
Hattori, Shuzo [1 ]
机构：
[1] Nagoya Univ, Dep of Electronics,, Nagoya, Jpn, Nagoya Univ, Dep of Electronics, Nagoya, Jpn
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1986年 / 25卷 / 01期
关键词：
D O I：
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学科分类号：
摘要：
ULTRAVIOLET RADIATION
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页码：64 / 67
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