ELLIPSOMETRY - A VERSATILE AND NON-DESTRUCTIVE TESTING TECHNIQUE.

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作者：
Davies, D.
Popov, W.A.
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来源：
Microelectronics Journal | 1979年 / 9卷 / 03期
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摘要：
Ellipsometry, that branch of optics concerned with the analysis, measurement and application of elliptically polarized light, is becoming widely used in the measurement of thin films. The principles of ellipsometry are reviewed and its applications are outlined, especially those relevant to the microelectronics industry.
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页码：27 / 30
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