Location control of crystal Si grain followed by excimer-laser melting of Si thin-films

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作者：
Ishihara, Ryoichi [1 ]
van der Wilt, Paul Ch. [1 ]
机构：
[1] Delft Univ of Technology, Delft, Netherlands
来源：
| 1998年 / JJAP, Tokyo, Japan卷 / 37期
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