Excimer laser-induced damage in bilayer carbide/polyimide systems

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作者
Danev, G. [1 ]
Spassova, E. [1 ]
Petkov, K. [1 ]
Tomov, R.I. [2 ]
Popova, K. [2 ]
Atanasov, P.A. [2 ]
Ihlemann, J. [3 ]
机构
[1] Central Laboratory of Photoprocesses, Bulgarian Academy of Sciences, Acad. G. Bonchev St., Bl. 109, 1113 Sofia, Bulgaria
[2] Institute of Electronics, Bulgarian Academy of Sciences, 72 Tsarigradsko Chaussee Blvd, 1784 Sofia, Bulgaria
[3] Laser-Laboratorium, Hans-Adolf-Krebs-Weg 1, D-37077 Goetingen, Germany
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页码:227 / 234
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