Pulsed laser deposition: thin films in a flash

被引：0
|
作者：
Venkatesan, T. [1 ]
Green, Steven M. [1 ]
机构：
[1] Univ of Maryland, College Park, United States
来源：
Industrial Physicist | 1996年 / 2卷 / 03期
关键词：
Bismuth compounds - Deposition - Evaporation - High temperature superconductors - Laser beams - Laser pulses - Oxide superconductors - Rutherford backscattering spectroscopy - Superconducting films - Thin films - Ultraviolet radiation - Yttrium compounds;
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学科分类号：
摘要：
Today, flashes of laser light can be used to generate an atomic 'spray' that can produce a high-temperature superconductor (HTS) in a thin film that is only 1.2 nanometers thick. This technique - called pulsed laser deposition (PLD) - offers many potential applications, from integrated circuits and optoelectronics to micromechanics and medical implants. The ability to replicate the composition of the target source in the substrate film is considered as the greatest benefit of PLD.
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页码：22 / 24
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