Initiation of tungsten precipitation from gas phase on the surface of silicon dioxide

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作者：
Danilov, V.A.
Luk'yanov, E.V.
Manzha, N.M.
Stekolin, I.Yu.
Rakov, A.V.
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Poverkhnost Fizika Khimiya Mekhanika | 1992年 / 09期
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