Initiation of tungsten precipitation from gas phase on the surface of silicon dioxide

被引：0

|

作者：

Danilov, V.A.

Luk'yanov, E.V.

Manzha, N.M.

Stekolin, I.Yu.

Rakov, A.V.

机构：

来源：

Poverkhnost Fizika Khimiya Mekhanika | 1992年 / 09期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

收藏

相关论文

共 50 条

[1] Etching of silicon dioxide with gas phase HF and water:: Initiation, bulk etching, and termination
Montano-Miranda, Gerardo
Muscat, Anthony
ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES VIII, 2008, 134 : 3 - +
[2] THERMODYNAMIC CALCULATION OF CONDITIONS OF SILICON HYDROXYNITRIDES PRECIPITATION FROM GAS-PHASE
LAPENKOVA, SV
VARLAMOV, AG
SHIRYAEV, AA
GRIGOREV, YM
ZHURNAL NEORGANICHESKOI KHIMII, 1992, 37 (02): : 403 - 410
[3] Selective and blanket liquid phase deposition of silicon dioxide on silicon nitride and tungsten silicide
Lee, MK
Shih, CM
Yang, CD
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2003, 18 (07) : L45 - L48
[4] Surface and gas phase temperatures of a tungsten coil atomizer
Queiroz, ZF
Oliveira, PV
Nóbrega, JA
Silva, CS
Rufini, IA
de Sousa, SS
Krug, FJ
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2002, 57 (11) : 1789 - 1799
[5] Tokuyma Chemicals Completes Gas Phase Silicon Dioxide Project Phase Ⅱ
China Chemical Reporter, 2009, 20 (32) : 19 - 19
[6] PULSE-PLASMA METHOD OF SILICON STRUCTURE PRECIPITATION FROM GAS-PHASE
ARUTYUNYAN, GA
GASPARYAN, AG
ROSTOMYAN, GB
ARUTYUNYAN, SL
KHIMICHESKAYA FIZIKA, 1992, 11 (10): : 1395 - 1398
[7] KINETICS OF SILICON DIOXIDE AND TUNGSTEN INTERACTION
YUDIN, BF
MARKHOLI.TP
ZHURNAL PRIKLADNOI KHIMII, 1972, 45 (09) : 1912 - +
[8] Investigation of the mechanism of fractal growth of porous silicon dioxide layers from gas phase
Dultsev, FN
THIN SOLID FILMS, 2005, 478 (1-2) : 91 - 95
[9] THE GROWTH AND STRUCTURE OF RIBBON CRYSTALS OF SILICON PRODUCED DURING THE PRECIPITATION FROM A GAS-PHASE
AMMER, SA
KARELIN, BV
KRISTALLOGRAFIYA, 1981, 26 (02): : 415 - 416
[10] DEGRADATION OF MASKING PROPERTIES OF SILICON DIOXIDE DURING SELECTIVE PRECIPITATION OF TUNGSTEN IN LOW-PRESSURE REACTORS
MOLODTSOVA, EL
GOLOD, IA
ERKOV, VG
DEVYATOVA, SF
KARATAEVA, ND
KHIMICHESKAYA FIZIKA, 1992, 11 (12): : 1694 - 1698

← 1 2 3 4 5 →