Thermal conductivity study of porous low K dielectric materials

被引：0
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作者：
Hu, Chuan [1 ]
Morgen, Michael [1 ]
Ho, Paul S. [1 ]
Jain, Anurag [2 ]
Gill, William N. [2 ]
Plawsky, Joel L. [2 ]
Wayner Jr., Peter C. [2 ]
机构：
[1] Institute for Materials Science, Univ. of Texas, Austin, TX 78712, United States
[2] Dept. of Chemical Engineering, Rensselaer Poly. Inst., Troy, NY 12180, United States
来源：
Materials Research Society Symposium - Proceedings | 1999年 / 565卷
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页码：87 / 92
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