Beam interactions in a focused ion beam system with a liquid metal ion source

被引：0
|
作者：
机构：
[1] de Jager, P.W.H.
[2] Vijgen, L.J.
来源：
de Jager, P.W.H. | 1600年 / Publ by Elsevier Science Publ Co Inc, New York, NY, United States卷 / 23期
关键词：
Ion beams;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1 / 4
相关论文
共 50 条
  • [31] Performance of multicusp plasma ion source for focused ion beam applications
    Scipioni, L
    Stewart, D
    Ferranti, D
    Saxonis, A
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06): : 3194 - 3197
  • [32] Characterization of compact ICP ion source for focused ion beam applications
    Nabhiraj, P. Y.
    Menon, Ranjini
    Rao, G. Mohan
    Mohan, S.
    Bhandari, R. K.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 621 (1-3): : 57 - 61
  • [33] Praseodymium alloy ion source for focused ion beam implantation in superconductors
    Machalett, F
    Muhle, R
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03): : 1015 - 1017
  • [34] The gas field ion source for finely focused ion beam systems
    Thompson, W
    Armstrong, A
    Etchin, S
    Percival, R
    Saxonis, A
    ION-SOLID INTERACTIONS FOR MATERIALS MODIFICATION AND PROCESSING, 1996, 396 : 687 - 693
  • [35] EXPERIMENTAL FOCUSED ION-BEAM SYSTEM USING A GASEOUS FIELD-ION SOURCE
    BLACKWELL, RJ
    KUBBY, JA
    LEWIS, GN
    SIEGEL, BM
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 82 - 86
  • [36] A focused ion beam secondary ion mass spectroscopy system
    Crow, GA
    Christman, L
    Utlaut, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06): : 2607 - 2612
  • [37] Focused ion beam secondary ion mass spectroscopy system
    Crow, G.A.
    Christman, Locke
    Utlaut, M.
    Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1995, 13 (06):
  • [38] The use of ionic liquid ion sources in focused ion beam applications
    Zorzos, Anthony N.
    Lozano, Paulo C.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (06): : 2097 - 2102
  • [39] Advances in source technology for focused ion beam instruments
    Noel S. Smith
    John A. Notte
    Adam V. Steele
    MRS Bulletin, 2014, 39 : 329 - 335
  • [40] Lithium source for focused ion beam implantation and analysis
    Titze, Michael
    Perry, Daniel L.
    Auden, Elizabeth A.
    Pacheco, Jose L.
    Abraham, John B. S.
    Bielejec, Edward S.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2021, 39 (01):
12345